000 01299nam a22003255i 4500
005 20250919091051.0
008 171121t2017 nyua 001 0 eng d
020 _a9781681175034
_qHardcover
_cRM691.33
039 9 _a201711221132
_basrul
_c201711211211
_dnikzal
_c201711201726
_dnikzal
_c201711131214
_drahah
_y08-03-2017
_zrahah
040 _aDLC
_beng
_erda
_cDLC
_dUKM
090 _aTK7875.M5374 3
090 _aTK7875
_b.M5374 3
245 0 0 _aMicro electronic and mechanical systems /
_ceditor Zheng Yun Man.
264 1 _aNew York :
_bScitus Academics,
_c[2017].
264 4 _c©2017.
300 _aviii, 280 pages :
_billustrations ;
_c24cm.
336 _atext
_2rdacontent
337 _aunmediated
_2rdamedia
338 _avolume
_2rdacarrier
650 0 _aMicroelectromechanical systems.
700 1 _aZheng, Yun Man,
_eeditor.
907 _a.b16497016
_b2019-11-12
_c2019-11-12
942 _c01
_n0
_kTK7875.M5374 3
914 _avtls003624378
990 _anz
991 _aInstitut Kejuruteraan Mikro dan Nanoelektronik (IMEN)
998 _al
_b2017-03-08
_cm
_da
_feng
_gnyu
_y0
_z.b16497016
999 _c622727
_d622727