| 000 | 01299nam a22003255i 4500 | ||
|---|---|---|---|
| 005 | 20250919091051.0 | ||
| 008 | 171121t2017 nyua 001 0 eng d | ||
| 020 |
_a9781681175034 _qHardcover _cRM691.33 |
||
| 039 | 9 |
_a201711221132 _basrul _c201711211211 _dnikzal _c201711201726 _dnikzal _c201711131214 _drahah _y08-03-2017 _zrahah |
|
| 040 |
_aDLC _beng _erda _cDLC _dUKM |
||
| 090 | _aTK7875.M5374 3 | ||
| 090 |
_aTK7875 _b.M5374 3 |
||
| 245 | 0 | 0 |
_aMicro electronic and mechanical systems / _ceditor Zheng Yun Man. |
| 264 | 1 |
_aNew York : _bScitus Academics, _c[2017]. |
|
| 264 | 4 | _c©2017. | |
| 300 |
_aviii, 280 pages : _billustrations ; _c24cm. |
||
| 336 |
_atext _2rdacontent |
||
| 337 |
_aunmediated _2rdamedia |
||
| 338 |
_avolume _2rdacarrier |
||
| 650 | 0 | _aMicroelectromechanical systems. | |
| 700 | 1 |
_aZheng, Yun Man, _eeditor. |
|
| 907 |
_a.b16497016 _b2019-11-12 _c2019-11-12 |
||
| 942 |
_c01 _n0 _kTK7875.M5374 3 |
||
| 914 | _avtls003624378 | ||
| 990 | _anz | ||
| 991 | _aInstitut Kejuruteraan Mikro dan Nanoelektronik (IMEN) | ||
| 998 |
_al _b2017-03-08 _cm _da _feng _gnyu _y0 _z.b16497016 |
||
| 999 |
_c622727 _d622727 |
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