000 01353nam a2200361 i 4500
005 20250930141959.0
008 170529s2016 my a bm 000 0 eng d
039 9 _a201709120945
_blan
_c201709111657
_dhendon
_y05-29-2017
_zhamdan
040 _aUKM
_erda
090 _aTK7875.S233 2016 3 tesis
090 _aTK7875
_b.S233 2016 3
100 0 _aSaat Shukri Embong,
_eauthor.
245 1 0 _aDesign development and material characterisation of NEMS based pressure sensor /
_cSaat Shukri Embong.
264 0 _c2016.
300 _axviii, 169 pages :
_billustrations ;
_c30 cm.
336 _atext
_2rdacontent
337 _aunmediated
_2rdamedia
338 _avolume
_2rdacarrier
502 _aThesis (Ph.D) - Universiti Kebangsaan Malaysia, 2016.
504 _aReferences : page 150-160.
610 2 0 _aUniversiti Kebangsaan Malaysia
_xDissertations.
_962865
650 0 _aNanoelectromechanical systems
_xDesign and construction.
650 0 _aMicroelectromechanical systems.
650 0 _aMechanical engineering.
650 0 _aDissertations, Academic
_zMalaysia.
_962866
907 _a.b16479518
_b2025-07-18
_c2019-11-12
942 _c3
_n0
_kTK7875.S233 2016 3 tesis
914 _avtls003622576
990 _ahak/ha
991 _aFakulti Kejuruteraan dan Alam Bina
998 _al
_b2017-03-05
_cm
_dx
_feng
_gmy
_y0
_z.b16479518
999 _c621045
_d621045