| 000 | 01478nam a2200373 i 4500 | ||
|---|---|---|---|
| 005 | 20250930141348.0 | ||
| 008 | 160421s2015 my a bm 000 0 eng d | ||
| 039 | 9 |
_a201709111657 _bhendon _c201608151454 _dlan _c201608151235 _dhendon _y04-21-2016 _zmiza |
|
| 040 |
_aUKM _erda |
||
| 090 | _aTK7875.N645 2015 3 tesis | ||
| 090 |
_aTK7875 _b.N645 2015 3 |
||
| 100 | 0 |
_aNoraini Marsi, _eauthor. |
|
| 245 | 1 | 0 |
_a(3C-SiC) silicon carbide MEMS capacitive pressure sensor for high temperature applications / _cNoraini binti Marsi. |
| 264 | 0 | _c2015. | |
| 300 |
_axxvii, 233 pages : _billustrations (some colour) ; _c30 cm. |
||
| 336 |
_atext _2rdacontent |
||
| 337 |
_aunmediated _2rdamedia |
||
| 338 |
_avolume _2rdacarrier |
||
| 502 | _aThesis (PhD.) - Universiti Kebangsaan Malaysia, 2015. | ||
| 504 | _aReferences : page [217]-229. | ||
| 610 | 2 | 0 |
_aUniversiti Kebangsaan Malaysia _xDissertations. _962865 |
| 650 | 0 | _aMicroelectromechanical systems. | |
| 650 | 0 | _aSilicon carbide. | |
| 650 | 0 | _aMechanical engineering. | |
| 650 | 0 |
_aDissertations, Academic _zMalaysia. _962866 |
|
| 907 |
_a.b16318274 _b2025-07-18 _c2019-11-12 |
||
| 942 |
_c3 _n0 _kTK7875.N645 2015 3 tesis |
||
| 914 | _avtls003605356 | ||
| 990 | _armn/ha | ||
| 991 | _aInstitut Kejuruteraan Mikro dan Nanoelektronik | ||
| 998 |
_al _b2016-08-04 _cm _dx _feng _gmy _y0 _z.b16318274 |
||
| 999 |
_c609290 _d609290 |
||