| 000 | 01599nam a22003618i 4500 | ||
|---|---|---|---|
| 005 | 20250919011738.0 | ||
| 008 | 160412t2015 enk bi 001 0 eng d | ||
| 020 |
_a9781119055426 _qhardback _cRM465.08 |
||
| 039 | 9 |
_a201608011606 _blan _c201607211454 _didah _c201607201450 _didah _c201607131249 _drahah _y04-12-2016 _zrahah |
|
| 040 |
_aWaSeSS/DLC _beng _cWaSeSS _erda _dUKM |
||
| 090 | _aTK7875.C37 | ||
| 090 |
_aTK7875 _b.C37 3 |
||
| 100 | 1 |
_aCastaner, Luis, _eauthor. |
|
| 245 | 1 | 0 |
_aUnderstanding MEMS : _bprinciples and applications / _cLuis Castaner. |
| 246 | 1 | 8 |
_ispine title : _bundestanding MEMS. |
| 264 | 1 |
_aHoboken, New Jersey : _bJohn Wiley & Sons, _c2015. |
|
| 264 | 1 | _c©2015 | |
| 300 |
_axiv,314 pages ; _c25 cm. |
||
| 336 |
_atext _2rdacontent |
||
| 337 |
_aunmediated _2rdamedia |
||
| 338 |
_avolume _2rdacarrier |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 505 | _aScaling of forces -- Elasticity -- Bending of microstructures -- Piezoresistance and piezoelectricity -- Electrostatic driving and sensing -- Resonators -- Microfluidics and electrokinetics -- Thermal devices -- Fabrication. | ||
| 650 | 0 | _aMicroelectromechanical systems. | |
| 907 |
_a.b16308086 _b2019-11-12 _c2019-11-12 |
||
| 942 |
_c01 _n0 _kTK7875.C37 |
||
| 914 | _avtls003604204 | ||
| 990 | _ans | ||
| 991 | _aFakulti Kejuruteraan dan Alam Bina | ||
| 998 |
_al _b2016-12-04 _cm _da _feng _genk _y0 _z.b16308086 |
||
| 999 |
_c608355 _d608355 |
||