000 01477nam a2200361 i 4500
005 20250919011630.0
008 160323t20142014si a bi 000 0 eng
020 _a9789814576291
_qpaperback
_cRM618.24
039 9 _a201604080946
_bhaiyati
_c201604080942
_dhaiyati
_y03-23-2016
_zros
040 _aUKM
_erda
090 _aTK7874.J344 2014 3
090 _aTK7874
_b.J344 2014 3
100 1 _aJaeger, Richard C.,
_eauthor.
245 1 0 _aIntroduction to microelectronic fabrication /
_cRichard C. Jaeger.
250 _aSecond edition.
264 1 _aSingapore :
_bPearson,
_c2014.
264 4 _c©2014.
300 _a320 pages :
_billustrations ;
_c24 cm.
336 _atext
_2rdacontent
337 _aunmediated
_2rdamedia
338 _avolume
_2rdacarrier
490 1 _aModular series on solid state devices ;
_vv. 5
650 0 _aIntegrated circuits
_xVery large scale integration
_xDesign and construction
_vTextbooks.
830 _aModular series on solid state devices (Upper Saddle River, N.J.) ;
_vv. 5
907 _a.b16294907
_b2019-11-12
_c2019-11-12
942 _c01
_n0
_kTK7874.J344 2014 3
914 _avtls003602759
990 _anh
991 _aFakulti Kejuruteraan dan Alam Bina
998 _al
_b2016-10-03
_cm
_da
_feng
_gsi
_y0
_z.b16294907
999 _c607066
_d607066