| 000 | 01366nam a2200349 i 4500 | ||
|---|---|---|---|
| 005 | 20250930135538.0 | ||
| 008 | 140515s2014 maua b 001 0 eng c | ||
| 020 | _a9780815515937 | ||
| 020 | _a0815515936 | ||
| 035 | _a(OCoLC)ocn868205582 | ||
| 039 | 9 |
_y05-15-2014 _zzabidah |
|
| 040 |
_aStDuBDS _beng _erda _cCUD _dOCLCO _dCUI _dUKMGB _dIXA _dUKM |
||
| 050 | 4 |
_aTK7874 _b.S275 2014 |
|
| 100 | 1 |
_aSarkar, Jaydeep _c(Materials scientist), _eauthor. |
|
| 245 | 1 | 0 |
_aSputtering materials for VLSI and thin film devices / _cJaydeep Sarkar. |
| 264 | 1 |
_aWaltham, USA : _bElsevier, WA, William Andrew is an imprint of Elsevier, _c2014. |
|
| 300 |
_ax, 603 pages : _billustrations ; _c25 cm |
||
| 336 |
_atext _btxt _2rdacontent |
||
| 337 |
_aunmediated _bn _2rdamedia |
||
| 338 |
_avolume _bnc _2rdacarrier |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 |
_aMicroelectronics _xMaterials. _960417 |
|
| 650 | 0 |
_aFlat panel displays _xMaterials. |
|
| 650 | 0 | _aSputtering (Physics) | |
| 907 |
_a.b15900678 _b2019-11-13 _c2019-11-12 |
||
| 942 | _n0 | ||
| 914 | _avtls003559389 | ||
| 991 | _aFakulti Kejuruteraan dan Alam Bina | ||
| 998 |
_anone _b2014-02-05 _cm _da _feng _gmau _y0 _z.b15900678 |
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| 999 |
_c569678 _d569678 |
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