| 000 | 01466nam a2200361 i 4500 | ||
|---|---|---|---|
| 005 | 20250918233623.0 | ||
| 008 | 140310s2013 paua 001 0 eng d | ||
| 020 |
_a9780857095022 _cRM888.57 |
||
| 039 | 9 |
_a201405291517 _brosli _c201405271536 _dnikzal _c201405201609 _dnikzal _c201405091128 _drahah _y03-10-2014 _zrahah |
|
| 040 |
_aDLC _beng _erda _cDLC _dUKM _erda |
||
| 090 | _aTK7872.D48S634 | ||
| 090 |
_aTK7872.D48 _bS634 |
||
| 245 | 0 | 0 |
_aSmart sensors and MEMS : _bintelligent devices and microsystems for industrial applications / _cedited by Stoyan Nihtianov, Antonio Luque. |
| 264 | 1 |
_aPhiladelphia, PA : _bWoodhead Pub., _c2014. |
|
| 264 | 4 | _a© 2014. | |
| 300 |
_a538 pages : _billustrations ; _c24 cm. |
||
| 336 |
_atext _2rdacontent |
||
| 337 |
_aunmediated _2rdamedia |
||
| 338 |
_avolume _2rdacarrier |
||
| 490 | 0 |
_aWoodhead publishing series in electronic and optical materials ; _vno. 51. |
|
| 650 | 0 | _aDetectors. | |
| 650 | 0 | _aMicroelectromechanical systems. | |
| 650 | 0 | _aScanning systems. | |
| 830 | 0 |
_aWoodhead publishing series in electronic and optical materials ; _vno. 51. |
|
| 907 |
_a.b15842617 _b2019-11-12 _c2019-11-12 |
||
| 942 |
_c01 _n0 _kTK7872.D48S634 |
||
| 914 | _avtls003553020 | ||
| 990 | _anz | ||
| 991 | _aFakulti Sains Teknologi | ||
| 998 |
_at _b2014-10-03 _cm _da _feng _gpau _y0 _z.b15842617 |
||
| 999 |
_c564274 _d564274 |
||