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| 008 | 140310s2014 paua 001 0 eng d | ||
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_a201405271752 _bnikzal _c201405271706 _dnikzal _c201405201608 _dnikzal _c201405091119 _drahah _y03-10-2014 _zrahah |
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| 090 | _aTK7874.843.N344 | ||
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_aTK7874.843 _b.N344 |
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_aNanolithography : _bthe art of fabricating nanoelectronic and nanophotonic devices and systems / _cedited by Martin Feldman. |
| 264 | 1 |
_aPhiladelphia, PA : _bWoodhead Pub., _c2014. |
|
| 264 | 4 | _a© 2014 | |
| 300 |
_axxiv, 573 pages : _billustrations ; _c24 cm. |
||
| 336 |
_atext _2rdacontent |
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| 337 |
_aunmediated _2rdamedia |
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| 338 |
_avolume _2rdacarrier |
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| 490 | 0 |
_aWoodhead publishing series in electronic and optical materials ; _vno. 42 |
|
| 650 | 0 | _aNanolithography. | |
| 830 | 0 |
_aWoodhead publishing series in electronic and optical materials ; _vno. 42 |
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| 907 |
_a.b15842484 _b2019-11-12 _c2019-11-12 |
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_c01 _n0 _kTK7874.843.N344 |
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| 914 | _avtls003553006 | ||
| 990 | _anz | ||
| 991 | _aFakulti Sains Teknologi | ||
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_at _b2014-10-03 _cm _da _feng _gpau _y0 _z.b15842484 |
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