000 01518nam a2200397 i 4500
005 20250930135252.0
008 140227s2012 my ao bm 000 0 eng d
039 9 _a201405231114
_blan
_c201404221736
_dhendon
_y02-27-2014
_zzarina
040 _aUKM
_erda
090 _aTK7875.R647 2012 3tesis
090 _aTK7875
_b.R647 2012 3
100 0 _aRosminazuin Ab Rahim,
_eauthor.
245 1 0 _aProcess development for piezoresistive microcantilever biosensor using bulk micromachining technique /
_cRosminazuin binti Ab Rahim.
264 _c2012.
300 _axxvii, 236 pages :
_bphotographs,illustrations ;
_c30 cm.
336 _atext
_2rdacontent.
337 _aunmediated
_2rdamedia.
338 _avolume
_2rdacarrier.
502 _aThesis (Ph.D.) - Universiti Kebangsaan Malaysia, 2012.
504 _aReferences : page [223]-224.
610 2 0 _aUniversiti Kebangsaan Malaysia
_xDissertations.
_962865
650 0 _aDissertations, Academic
_zMalaysia.
_962866
650 0 _aBiosensors.
650 0 _aMicroelectromechanical systems.
650 0 _aBiomedical materials.
650 0 _aBioMEMS.
907 _a.b15834153
_b2025-07-18
_c2019-11-12
942 _c3
_n0
_kTK7875.R647 2012 3tesis
914 _avtls003552093
990 _aszj/ha
990 _aha
991 _aInstitut Kejuruteraan Mikro dan Nanoelektronik
998 _al
_b2014-01-02
_cm
_dx
_feng
_gmy
_y0
_z.b15834153
999 _c563478
_d563478