000 01369cam a22003374a 4500
005 20250918145654.0
008 111130s2012 njua b 001 0 eng
020 _a9780132497367 (alk. paper)
_cRM567.50
020 _a0132497360 (alk. paper)
039 9 _a201602031019
_bros
_c201412011509
_dlatihan
_c201310041135
_dlatihan
_c201112201712
_dzaina
_y11-30-2011
_zfarid
040 _aUKM
090 _aTK7875.L583 2012 3
090 _aTK7875
_b.L583 2012
100 1 _aLiu, Chang,
_cPh.D.
245 1 0 _aFoundations of MEMS /
_cChang Liu.
250 _a2nd ed.
260 _aUpper Saddle River, N.J. :
_bPrentice Hall,
_c2012.
300 _axiv, 562 p. :
_bill. ;
_c24 cm.
504 _aIncludes bibliographical references and index.
526 _aBuku bacaan asas fakulti
650 0 _aMicroelectromechanical systems.
907 _a.b15203906
_b2021-05-28
_c2019-11-12
942 _c01
_n0
_kTK7875.L583 2012 3
914 _avtls003483732
990 _azsz
991 _aInstitut Kejuruteraan Mikro dan Nanoelektronik (IMEN) - Pasca
991 _aFakulti Kejuruteraan dan Alam Bina
998 _al
_b2011-04-11
_cm
_da
_feng
_gnju
_y0
_z.b15203906
999 _c504585
_d504585