| 000 | 01369cam a22003374a 4500 | ||
|---|---|---|---|
| 005 | 20250918145654.0 | ||
| 008 | 111130s2012 njua b 001 0 eng | ||
| 020 |
_a9780132497367 (alk. paper) _cRM567.50 |
||
| 020 | _a0132497360 (alk. paper) | ||
| 039 | 9 |
_a201602031019 _bros _c201412011509 _dlatihan _c201310041135 _dlatihan _c201112201712 _dzaina _y11-30-2011 _zfarid |
|
| 040 | _aUKM | ||
| 090 | _aTK7875.L583 2012 3 | ||
| 090 |
_aTK7875 _b.L583 2012 |
||
| 100 | 1 |
_aLiu, Chang, _cPh.D. |
|
| 245 | 1 | 0 |
_aFoundations of MEMS / _cChang Liu. |
| 250 | _a2nd ed. | ||
| 260 |
_aUpper Saddle River, N.J. : _bPrentice Hall, _c2012. |
||
| 300 |
_axiv, 562 p. : _bill. ; _c24 cm. |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 526 | _aBuku bacaan asas fakulti | ||
| 650 | 0 | _aMicroelectromechanical systems. | |
| 907 |
_a.b15203906 _b2021-05-28 _c2019-11-12 |
||
| 942 |
_c01 _n0 _kTK7875.L583 2012 3 |
||
| 914 | _avtls003483732 | ||
| 990 | _azsz | ||
| 991 | _aInstitut Kejuruteraan Mikro dan Nanoelektronik (IMEN) - Pasca | ||
| 991 | _aFakulti Kejuruteraan dan Alam Bina | ||
| 998 |
_al _b2011-04-11 _cm _da _feng _gnju _y0 _z.b15203906 |
||
| 999 |
_c504585 _d504585 |
||