| 000 | 01088nam a2200289 a 4500 | ||
|---|---|---|---|
| 005 | 20250918145436.0 | ||
| 008 | 111019s2010 ne a bi 001 0 eng | ||
| 020 |
_a9780815520313 _cRM672.70 |
||
| 039 | 9 |
_a201111221534 _bariff _c201111171522 _drosma _c201111161632 _drosma _c201111161623 _drosma _y10-19-2011 _zmazarita |
|
| 040 | _aUKM | ||
| 090 | _aTP156.C57H343 2010 3 | ||
| 090 |
_aTP156.C57 _bH343 2010 |
||
| 245 | 0 | 0 |
_aHandbook of deposition technologies for films and coatings : _bscience, applications and technology / _cedited by Peter M. Martin |
| 250 | _a3rd. ed. | ||
| 260 |
_aAmsterdam : _bElsevier, _c2010 |
||
| 300 |
_axviii, 912 p. : _bill. ; _c25 cm. |
||
| 504 | _aIncludes references (p. 900-901) and index | ||
| 650 | 0 | _aCoating processes | |
| 700 | 1 | _aMartin, Peter M. | |
| 907 |
_a.b15178729 _b2021-05-28 _c2019-11-12 |
||
| 942 |
_c01 _n0 _kTP156.C57H343 2010 3 |
||
| 914 | _avtls003481110 | ||
| 990 | _armh | ||
| 991 | _aInstitut Kejuruteraan Mikro dan Nanoelektronik (IMEN) - Pasca | ||
| 998 |
_al _b2011-06-10 _cm _da _feng _gne _y0 _z.b15178729 |
||
| 999 |
_c502100 _d502100 |
||