| 000 | 01852nam a2200421 i 4500 | ||
|---|---|---|---|
| 005 | 20250918145423.0 | ||
| 008 | 111015m ne a 001 0 eng d | ||
| 020 |
_a9781437778304 _qvolume 2 _cRM736.80 |
||
| 020 |
_a9780323313032 _qhardback _qvolume 7 _cRM988.24 |
||
| 039 | 9 |
_a201610201103 _bhayat _c201610201103 _dhayat _c201609271611 _dasrul _c201609231012 _dasrul _y10-15-2011 _zmazarita |
|
| 040 |
_aUKM _erda |
||
| 090 | _aTA418.7.D449 | ||
| 090 |
_aTA418.7 _b.D449 |
||
| 245 | 0 | 0 |
_aDevelopments in surface contamination and cleaning / _cedited by Rajiv Kohli and Kashmiri L. Mittal. |
| 264 | 1 |
_aAmsterdam : _bElsivier, _c2008- |
|
| 300 |
_a2 volumes : _billustrations ; _c24 cm. |
||
| 490 | 1 |
_aDevelopments in surface contamination and cleaning series ; _v2 |
|
| 490 | 1 |
_aDevelopments in surface contamination and cleaning series ; _v7 |
|
| 504 | _aIncludes references and index. | ||
| 505 | 0 |
_gvol. 2. _tParticle deposition, control and removal - _gvol. 7. _tCleanliness validation and verification. |
|
| 650 | 0 | _aSurfaces (Technology). | |
| 650 | 0 |
_aSurface contamination _xPrevention. |
|
| 650 | 0 |
_aParticles _xMeasurement. |
|
| 700 | 1 |
_aKohli, Rajiv, _eeditor. |
|
| 700 | 1 |
_aMittal, Kashmiri L., _eeditor. |
|
| 740 | 0 |
_aParticle deposition, control and removal ; _nvolume 2. |
|
| 740 | 0 |
_aCleanliness validation and verification ; _nvolume 7. |
|
| 830 | 0 |
_aDevelopments in surface contamination and cleaning series; _v2 |
|
| 830 | 0 |
_aDevelopments in surface contamination and cleaning series; _v7 |
|
| 907 |
_a.b15175856 _b2021-05-28 _c2019-11-12 |
||
| 942 |
_c01 _n0 _kTA418.7.D449 |
||
| 914 | _avtls003480785 | ||
| 990 | _armh/aa | ||
| 991 | _aInstitut Kejuruteraan Mikro dan Nanoelektronik (IMEN) - Pasca | ||
| 991 | _aFakulti Sains dan Teknologi | ||
| 998 |
_al _at _b2011-02-10 _cm _da _feng _gne _y0 _z.b15175856 |
||
| 999 |
_c501821 _d501821 |
||