| 000 | 01074nam a2200289 a 4500 | ||
|---|---|---|---|
| 005 | 20250918142130.0 | ||
| 008 | 110606s2011 njua b 001 0 eng | ||
| 020 |
_a9780470625958 (hbk.) _cRM761.79 |
||
| 039 | 9 |
_a201106161448 _bzabidah _c201106091707 _dfati _c201106091706 _dfati _y06-06-2011 _zrasyilla |
|
| 040 | _aUKM | ||
| 090 | _aQC611.6.S9H366 3 | ||
| 090 |
_aQC611.6.S9 _bH366 3 |
||
| 245 | 0 | 0 |
_aHandbook of cleaning for semiconductor manufacturing : _bfundamentals and applications / _c[edited by] Karen A. Reinhardt, Richard F. Reidy. |
| 260 |
_aSalem, Mass. : _bScrivener, _c2011 |
||
| 300 |
_axxii, 590 p. : _bill. ; _c26 cm. |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 |
_aSemiconductors _xSurfaces. |
|
| 700 | 1 | _aReinhardt, Karen A. | |
| 700 | 1 | _aReidy, Richard F. | |
| 907 |
_a.b15053076 _b2021-05-28 _c2019-11-12 |
||
| 942 |
_c01 _n0 _kQC611.6.S9H366 3 |
||
| 914 | _avtls003467784 | ||
| 990 | _afka/za | ||
| 991 | _aFakulti Kejuruteraan Alam Bina | ||
| 998 |
_al _b2011-06-06 _cm _da _feng _gnju _y0 _z.b15053076 |
||
| 999 |
_c489982 _d489982 |
||