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005 20250918142127.0
008 110606s2010 waua bi 000 0 eng
020 _a9780819475626
_cRM351.75
020 _a9781118030028
039 9 _a201106141508
_bariff
_y06-06-2011
_zrasyilla
040 _aUKM
090 _aNE2425.O39 3
090 _aNE2425
_b.O39
100 1 _aOkoroanyanwu, Uzodinma.
245 1 0 _aChemistry and lithography /
_cUzodinma Okoroanyanwu.
260 _aBellingham, Wash. :
_bSPIE Press,
_c2010.
300 _axxix, 861 p. :
_bill. ;
_c26 cm.
490 0 _aPress monograph ;
_v192
650 0 _aLithography.
650 0 _aChemistry, Technical.
710 2 _aSociety of Photo-optical Instrumentation Engineers.
907 _a.b15052680
_b2021-05-28
_c2019-11-12
942 _c01
_n0
_kNE2425.O39 3
914 _avtls003467744
991 _aFakunti Kejuruteraan dan Alam Bina - Pasca
998 _al
_b2011-06-06
_cm
_da
_feng
_gwau
_y0
_z.b15052680
999 _c489943
_d489943