| 000 | 01202cam a22003258a 4500 | ||
|---|---|---|---|
| 005 | 20250918140612.0 | ||
| 008 | 110429s2009 nyu b 000 0 eng | ||
| 020 |
_a9780815515876 _cRM552.60 |
||
| 039 | 9 |
_a201111100931 _bzaina _c201110191657 _dmazarita _y04-29-2011 _zmazarita |
|
| 040 | _aUKM | ||
| 090 | _aTJ1191.5.W858 pasca | ||
| 090 |
_aTJ1191.5 _b.W858 |
||
| 100 | 1 | _aWuthrich, Rolf | |
| 245 | 1 | 0 |
_aMicromachining using electrochemical discharge phenomenon : _bfundamentals and applications of spark assisted chemical engraving / _cRolf Wuthrich |
| 260 |
_aNorwich, NY, USA : _bW. Andrew, _c2009 |
||
| 300 |
_axiv, 181 p. : _bill. ; _c27 cm. |
||
| 490 | 0 | _aMicro & nano technologies | |
| 504 | _aIncludes bibliographical references | ||
| 650 | 0 | _aMicromachining | |
| 650 | 0 | _aElectrochemical cutting | |
| 650 | 0 |
_aElectric discharges _xIndustrial applications |
|
| 650 | 0 | _aPlasma etching | |
| 907 |
_a.b15025172 _b2021-05-28 _c2019-11-12 |
||
| 942 |
_c01 _n0 _kTJ1191.5.W858 pasca |
||
| 914 | _avtls003464798 | ||
| 990 | _azsz | ||
| 991 | _aInstitut Kejuruteraan Mikro dan Nanoelektronik (IMEN) - Pasca | ||
| 998 |
_al _b2011-03-04 _cm _da _feng _gnyu _y0 _z.b15025172 |
||
| 999 |
_c487232 _d487232 |
||