| 000 | 01047cam a22003018a 4500 | ||
|---|---|---|---|
| 005 | 20250918130124.0 | ||
| 008 | 110321s2010 enka i 001 0 eng | ||
| 020 |
_a9780470749838 _cRM244.80 |
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| 039 | 9 |
_a201106081125 _bariff _c201106020841 _drasyilla _y03-21-2011 _zrasyilla |
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| 040 | _aUKM | ||
| 090 | _aTK7875 .F726 2010 3 | ||
| 090 |
_aTK7875 _b.F726 2010 |
||
| 100 | 1 | _aFranssila, Sami. | |
| 245 | 1 | 0 |
_aIntroduction to microfabrication / _cSami Franssila. |
| 250 | _a2nd ed. | ||
| 260 |
_aChichester, West Sussex, England : _bJohn Wiley & Sons, _c2010. |
||
| 300 |
_axiv, 518 p. : _bill. ; _c25 cm. |
||
| 500 | _aIncludes index. | ||
| 650 | 0 | _aMicroelectromechanical systems. | |
| 650 | 0 | _aElectronic apparatus and appliances. | |
| 650 | 0 | _aMicrofabrication. | |
| 907 |
_a.b14975634 _b2021-05-28 _c2019-11-12 |
||
| 942 |
_c01 _n0 _kTK7875 .F726 2010 3 |
||
| 914 | _avtls003459635 | ||
| 991 | _aInstitut Kejuruteraan Mikro dan Nanoelektronik (IMEN-P) | ||
| 998 |
_al _b2011-08-03 _cm _da _feng _genk _y0 _z.b14975634 |
||
| 999 |
_c482377 _d482377 |
||