000 01372nam a2200349 a 4500
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007 cr nn 008maaau
008 101230s2010 enk s j eng d
020 _a9781849962544
_qelectronic book
039 9 _y12-30-2010
_zmuhaimin
090 _aTA418.9.N35
_bG211 2010
100 1 _aGao, Wei.
245 1 0 _aPrecision nanometrology
_h[electronic resource] :
_bsensors and measuring systems for nanomanufacturing /
_cby Wei Gao.
260 _aLondon :
_bSpringer-Verlag London,
_c2010.
300 _a1online resource (xiii, 354 pages) :
_billustrations, digital.
440 0 _aSpringer series in advanced manufacturing,
_x1860-5168
650 0 _aNanostructured materials
_xMeasurement.
650 2 4 _aManufacturing, Machines, Tools.
650 2 4 _aControl , Robotics, Mechatronics.
650 2 4 _aNanotechnology.
650 2 4 _aMeasurement Science and Instrumentation.
710 2 _aSpringerLink (Online service)
773 0 _tSpringer eBooks
856 4 0 _uhttps://eresourcesptsl.ukm.remotexs.co/user/login?url=http://dx.doi.org/10.1007/978-1-84996-254-4
907 _a.b14889948
_b2023-11-29
_c2019-11-12
942 _n0
_kTA418.9.N35 G211 2010
914 _avtls003450697
998 _ae0001
_b2010-04-12
_cm
_dz
_feng
_genk
_y0
_z.b14889948
999 _c475554
_d475554