000			01507nam a2200409 a 4500
005			20250918124713.0
006			m d
007			cr nn 008maaau
008			101230s2010 enk s j eng d
020			_a9781848828940 (electronic bk.)
020			_a9781848828933 (paper)
035			_a(Springer)978-1-84882-893-3
039		9	_y12-30-2010 _zmuhaimin
050	0	4	_aTS695 _b.Y36 2010
082	0	4	_a671.735 _222
090			_aTS695 _b.X8 2010
100	1		_aXu, Yongdong.
245	1	0	_aChemical vapour deposition _h[electronic resource] : _ban integrated engineering design for advanced materials / _cby Yongdong Xu, Xiu-Tian Yan.
260			_aLondon : _bSpringer-Verlag London, _c2010.
300			_axiv, 342 p. : _bill., digital ; _c24 cm.
440		0	_aEngineering materials and processes, _x1619-0181
650		0	_aChemical vapor deposition.
650		0	_aCoating processes.
650	2	4	_aMaterials Science, general.
650	2	4	_aOperating Procedures, Materials Treatment.
650	1	4	_aEngineering.
700	1		_aYan, Xiu-Tian.
710	2		_aSpringerLink (Online service)
773	0		_tSpringer eBooks
856	4	0	_uhttps://eresourcesptsl.ukm.remotexs.co/user/login?url=http://link.springer.com/10.1007/978-1-84882-894-0
907			_a.b14886996 _b2023-12-05 _c2019-11-12
942			_n0 _kTS695 .X8 2010
914			_avtls003450389
998			_ae0001 _b2010-04-12 _cm _da _feng _genk _y0 _z.b14886996
999			_c475259 _d475259