000 00974nam a2200301 a 4500
005 20250918123732.0
008 101224s2010 xxka 001 0 eng
020 _a9780080964546 (hbk.) :
_cRM424.83
039 9 _a201102081430
_bzabidah
_c201101251052
_dfati
_y12-24-2010
_zrahah
040 _aUKM
090 _aT174.7.L434 3
090 _aT174.7
_b.L434
100 1 _aLeach, Richard K.
245 1 0 _aFundamental principles of engineering nanometrology /
_cProfessor Richard K. Leach
260 _aOxford :
_bWilliam Andrew/Elsevier,
_c2010
300 _axxvi, 321 p. :
_bill. ;
_c24 cm.
500 _aIncludes index
650 0 _aNanotechnology
650 0 _aMicrotechnology
650 0 _aMetrology
907 _a.b14876231
_b2021-05-28
_c2019-11-12
942 _c01
_n0
_kT174.7.L434 3
914 _avtls003449241
990 _afka/za
991 _aFakulti Kejuruteraan & Alam Bina
998 _al
_b2010-11-12
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999 _c474190
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