| 000 | 01096cam a2200313 a 4500 | ||
|---|---|---|---|
| 005 | 20250918122610.0 | ||
| 008 | 101027s2009 waua bi 001 0 eng | ||
| 020 |
_a9780819475602 _cRM291.35 |
||
| 039 | 9 |
_a201401281518 _blan _c201101311543 _dzarina _c201012171548 _dsanusi _c201012151357 _dsanusi _y10-27-2010 _zrahah |
|
| 040 | _aUKM | ||
| 090 | _aTK7872.M3L565 3 | ||
| 090 |
_aTK7872.M3 _b.L565 2009 |
||
| 090 |
_aTK7872.M3 _b.L565 2009 3 |
||
| 100 | 1 |
_aLin, Burn Jeng, _d1942- |
|
| 245 | 1 | 0 |
_aOptical lithography : _bhere is why / _cBurn J. Lin. |
| 260 |
_aBellingham, Wash. : _bSPIE, _c2009. |
||
| 300 |
_axiv, 477 p. : _bill. ; _c26 cm. |
||
| 504 | _aIncludes index. | ||
| 650 | 0 | _aMicrolithography. | |
| 650 | 0 |
_aSemiconductors _xEtching. |
|
| 650 | 0 |
_aLasers _xIndustrial applications. |
|
| 907 |
_a.b14823433 _b2021-05-28 _c2019-11-12 |
||
| 942 |
_c01 _n0 _kTK7872.M3L565 3 |
||
| 914 | _avtls003443671 | ||
| 991 | _aFakulti Sains Sosial dan Kemanusiaan | ||
| 991 | _aFakulti Kejuruteraan dan Alam Bina | ||
| 998 |
_al _at _b2010-01-10 _cm _da _feng _gwau _y0 _z.b14823433 |
||
| 999 |
_c469060 _d469060 |
||