| 000 | 01086nam a2200325 a 4500 | ||
|---|---|---|---|
| 005 | 20250918122537.0 | ||
| 008 | 101015s2009 nyua b 001 0 eng | ||
| 020 |
_a9780071549189 (hbk.) _cRM362.25 |
||
| 020 | _a0071549188 (hbk.) | ||
| 039 | 9 |
_a201010261508 _bzarina _y10-15-2010 _zfarid |
|
| 040 | _aUKM | ||
| 090 | _aTK7872.M3E994 | ||
| 090 |
_aTK7872.M3 _bE994 |
||
| 245 | 0 | 0 |
_aExtreme ultraviolet lithography / _c[edited by] Banqiu Wu, Ajay Kumar. |
| 260 |
_aNew York : _bMcGraw-Hill, _c2009 |
||
| 300 |
_axiv, 465 p. : _bill. ; _c24 cm. |
||
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 | _aExtreme ultraviolet lithography | |
| 650 | 0 |
_aIntegrated circuits _xMasks |
|
| 650 | 0 |
_aIntegrated circuits _xDesign and construction |
|
| 700 | 1 | _aWu, Banqiu | |
| 700 | 1 |
_aKumar, Ajay, _d1962- |
|
| 907 |
_a.b14817093 _b2021-05-28 _c2019-11-12 |
||
| 942 |
_c01 _n0 _kTK7872.M3E994 |
||
| 914 | _avtls003443009 | ||
| 990 | _aszj | ||
| 991 | _aPusat Pengajian Fizik Gunaan - QFG | ||
| 998 |
_al _b2010-02-10 _cm _da _feng _gnyu _y0 _z.b14817093 |
||
| 999 |
_c468431 _d468431 |
||