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| 008 | 100902s2006 gw q j eng d | ||
| 020 | _a9783540336556 (electronic bk.) | ||
| 020 | _a9783540211174 (paper) | ||
| 035 | _a(Springer)978-3-540-21117-4 | ||
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_aMEMS _h[electronic resource] : _ba practical guide to design, analysis, and applications / _cedited by Jan G. Korvink, Oliver Paul. |
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_aBerlin, Heidelberg : _bSpringer-Verlag Berlin Heidelberg, _c2006. |
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_axxv, 965 p. : _bill., digital ; _c24 cm. |
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| 650 | 0 | _aMicroelectromechanical systems. | |
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_aKorvink, J. G. _q(Jan G.). _954556 |
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| 700 | 1 | _aPaul, Oliver. | |
| 710 | 2 | _aSpringerLink (Online service) | |
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