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005 20250913113959.0
008 981208s1992 xxua 00| 0 eng
010 _a91-044921
020 _a0442005741
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039 9 _a200801271647
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_y08-18-1999
_zload
090 _aTH7694.L54
090 _aTH7694
_b.L54
100 1 _aLieberman, Alvin,
_d1921-
245 1 0 _aContamination control and cleanrooms :
_bproblems, engineering solutions, and applications /
_cAlvin Lieberman
260 _aNew York :
_bVan Nostrand Reinhold ,
_c1992
300 _aviii, 411 p. :
_bill. ;
_c24 cm.
650 0 _aClean rooms
650 0 _aDecontamination (From gases, chemicals, etc.)
907 _a.b10445122
_b2021-05-28
_c2019-11-12
942 _c01
_n0
_kTH7694.L54
914 _avtls000046342
991 _aFakulti Kejuruteraan
998 _al
_b1999-05-08
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_y0
_z.b10445122
999 _c46469
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