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_aMEMS _h[electronic resource] : _bintroduction and fundamentals / _cedited by Mohamed Gad-El-Hak |
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_aBoca Raton : _bCRC/Taylor & Francis, _c2006 |
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| 490 | 1 | _aMechanical engineering series | |
| 500 | _aAccess to 2http://www.egnetbase.com/ejournals/search/advsearch1.asp3 and type in the title. You may access the full text after you type in the advanced search screen | ||
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 | _aMicroelectromechanical systems | |
| 650 | 0 |
_aMicroelectronics _960418 |
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| 650 | 0 | _aNanotechnology | |
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_aGad-el-Hak, Mohamed, _d1945- |
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| 830 | 0 | _aMechanical engineering series (Boca Raton, Fla.) | |
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