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090 _aTK7836
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245 0 0 _aMicrofabrication and nanomanufacturing
_h[electronic resource] /
_c[edited by] Mark J. Jackson
260 _aBoca Raton, FL :
_bTaylor & Francis,
_c2005
500 _aAccess to 2http://www.egnetbase.com/ejournals/search/advsearch1.asp3 and type in the title. You may access the full text after you type in the advanced search screen
504 _aIncludes bibliographical references and index
650 0 _aMicroelectronics
_960418
650 0 _aIntegrated circuits
_xDesign and construction
650 0 _aMicroelectromechanical systems
_xDesign and construction
700 1 _aJackson, Mark J.
856 4 0 _uhttps://eresourcesptsl.ukm.remotexs.co/login?url=http://www.egnetbase.com/ejournals/search/advsearch1.asp
856 4 0 _3CRCnetBASE
_uhttp://www.engnetbase.com/ejournals/books/book_km.asp?id=4077
_zClick here for the electronic version
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