000			01947cam a22004454a 4500
005			20250918011732.0
006			m d
007			cr cn ---ancau
008			090707s2001 flua sb 001 0 eng
010			_a00-059910
020			_a0849311780
035			_a12111712
039		9	_y07-07-2009 _zpuitm2
040			_aUKM
042			_apcc
082	0	0	_a621.3815/2 _221
090			_aTK7871.85 _b.R863 2001
245	0	0	_aRun-to-run control in semiconductor manufacturing _h[electronic resource] / _cedited by James Moyne, Enrique del Castillo, Arnon Max Hurwitz
260			_aBoca Raton : _bCRC Press, _c2001
500			_aAccess to 2http://www.egnetbase.com/ejournals/search/advsearch1.asp3 and type in the title. You may access the full text after you type in the advanced search screen
504			_aIncludes bibliographical references and index
650		0	_aSemiconductors _xDesign and construction
650		0	_aSemiconductor industry _xProduction control
650		0	_aElectronic packaging
650		0	_aProduction management
700	1		_aMoyne, James
700	1		_aDel Castillo, Enrique
700	1		_aHurwitz, Arnon Max
856	4	0	_uhttps://eresourcesptsl.ukm.remotexs.co/login?url=http://www.egnetbase.com/ejournals/search/advsearch1.asp
856	4	0	_3CRCnetBASE _uhttp://www.engnetbase.com/ejournals/books/book_km.asp?id=500 _zClick here for the electronic version
907			_a.b14538477 _b2022-04-06 _c2019-11-12
942			_n0 _kTK7871.85 .R863 2001
914			_avtls003413695
906			_a7 _bcbc _corignew _d1 _eocip _f20 _gy-gencatlg
990			_aLiza
998			_ae _b2009-07-07 _cm _dz _feng _gflu _y0 _z.b14538477
999			_c446065 _d446065