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_aTK7871.85 _b.H3337 2001 |
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_aHandbook of silicon semiconductor metrology _h[electronic resource] / _cedited by Alain C. Diebold |
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_aNew York : _bMarcel Dekker, _c2001 |
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| 500 | _aAccess to 2http://www.egnetbase.com/ejournals/search/advsearch1.asp3 and type in the title. You may access the full text after you type in the advanced search screen | ||
| 504 | _aIncludes bibliographical references and index | ||
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_aSemiconductors _xMeasurement |
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_aSemiconductors _xInspection |
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_aDiebold, A. C. _q(Alain C.) |
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_3CRCnetBASE _uhttp://www.engnetbase.com/ejournals/books/book_km.asp?id=3065 _zClick here for the electronic version |
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