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_aTK7871.85 _b.S5224 2005 |
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_aSherer, J. Michael, _d1958- |
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| 245 | 1 | 0 |
_aSemiconductor industry _h[electronic resource] : _bwafer fab exhaust management / _cJ. Michael Sherer |
| 246 | 3 | 0 | _aWafer fab exhaust management |
| 260 |
_aBoca Raton : _bCRC/Taylor & Francis, _c2005 |
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| 500 | _aAccess to 2http://www.engnetbase.com/ejournals/search/advsearch1.asp3 and type in the title. You may access the full text after you type in the advanced search screen | ||
| 500 | _aIncludes index | ||
| 650 | 0 |
_aSemiconductor wafers _xDesign and construction |
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| 650 | 0 |
_aSemiconductor industry _xEnvironmental aspects |
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| 650 | 0 |
_aVolatile organic compounds _xEnvironmental aspects |
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| 650 | 0 |
_aAir _xPurification _xTechnological innovations |
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| 856 | 4 | 0 | _uhttps://eresourcesptsl.ukm.remotexs.co/login?url=://www.engnetbase.com/ejournals/search/advsearch1.asp |
| 856 | 4 | 0 |
_3CRCnetBASE _uhttp://www.engnetbase.com/ejournals/books/book_km.asp?id=4666 _zClick here for the electronic version |
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_a.b14532815 _b2022-04-06 _c2019-11-12 |
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