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090 _aTK153
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100 1 _aAllen, James J.
245 1 0 _aMicro electro mechanical system design
_h[electronic resource] /
_cJames J. Allen
260 _aBoca Raton :
_bTaylor & Francis,
_c2005
490 1 _aMechanical engineering ;
_v192
500 _aAccess to 2http://www.engnetbase.com/ejournals/search/advsearch1.asp3 and type in the title. You may access the full text after you type in the advanced search screen
504 _aIncludes bibliographical references and index
650 0 _aMicroelectromechanical systems
_xDesign and construction
650 0 _aEngineering design
830 0 _aMechanical engineering (Taylor & Francis) ;
_v192
856 4 0 _uhttps://eresourcesptsl.ukm.remotexs.co/login?url=http://www.engnetbase.com/ejournals/search/advsearch1.asp
856 4 0 _3CRCnetBASE
_uhttp://www.engnetbase.com/ejournals/books/book_km.asp?id=4159
_zClick here for the electronic version
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_c2019-11-12
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