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| 008 | 090703s2006 flua sb 001 0 eng | ||
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_a013338095 _2Uk |
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| 020 | _a0849339286 (alk. paper) | ||
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_aTK7874.58 _b.B69 2006 |
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| 100 | 1 |
_aBowen, D. Keith _q(David Keith), _d1940- |
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| 245 | 1 | 0 |
_aX-ray metrology in semiconductor manufacturing _h[electronic resource] / _cD. Keith Bowen, Brian K. Tanner |
| 260 |
_aBoca Raton : _bCRC/Taylor & Francis, _c2006 |
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| 500 | _aAccess to 2http://www.egnetbase.com/ejournals/search/advsearch1.asp3 and type in the title. You may access the full text after you type in the advanced search screen | ||
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 |
_aSemiconductors _xDesign and construction _xQuality control |
|
| 650 | 0 |
_aIntegrated circuits _xMeasurement |
|
| 650 | 0 |
_aSemiconductor wafers _xInspection |
|
| 650 | 0 |
_aX-rays _xDiffraction |
|
| 650 | 0 | _aFluroscopy | |
| 700 | 1 |
_aTanner, B. K. _q(Brian Keith) |
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| 856 | 4 | 0 | _uhttps://eresourcesptsl.ukm.remotexs.co/login?url=http://www.egnetbase.com/ejournals/search/advsearch1.asp |
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_3CRCnetBASE _uhttp://www.engnetbase.com/ejournals/books/book_km.asp?id=4809 _zClick here for the electronic version |
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_a.b14531513 _b2022-04-06 _c2019-11-12 |
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