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| 008 | 090702s2006 flua sb 001 0 eng | ||
| 010 | _a2005-024414 | ||
| 020 | _a0849335434 (alk. paper) | ||
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_aScientific wet process technology for innovative LSI/FPD manufacturing _h[electronic resource] / _cedited by Tadahiro Ohmi |
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_aBoca Raton, FL : _bCRC/Taylor & Francis, _c2006 |
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| 500 | _aAccess to 2http://www.egnetbase.com/ejournals/search/advsearch1.asp3 and type in the title. You may access the full text after you type in the advanced search screen | ||
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 |
_aSemiconductors _xDesign and construction |
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| 650 | 0 |
_aSemiconductors _xCleaning |
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_aIntegrated circuits _xDesign and construction |
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_aOhmi, Tadahiro, _d1939- |
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_3CRCnetBASE _uhttp://www.engnetbase.com/ejournals/books/book_km.asp?id=5038 _zClick here for the electronic version |
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