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010 _a2006-031516
020 _a9780824790240 (alk. paper)
020 _a0824790243 (alk. paper)
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_zpuitm2
040 _aUKM
082 0 0 _a621.3815/31
_222
090 _aTK7836
_b.M525 2007
245 0 0 _aMicrolithography
_h[electronic resource] :
_bscience and technology /
_ceditors, Kazuaki Suzuki and Bruce W. Smith
250 _a2nd ed.
260 _aBoca Raton :
_bTaylor & Francis,
_cc2007
490 0 _aOptical science and engineering series
500 _aAccess to 2http://www.egnetbase.com/ejournals/search/advsearch1.asp3 and type in the title. You may access the full text after you type in the advanced search screen
500 _a'A CRC title'
504 _aIncludes bibliographical references and index
650 0 _aMicrolithography
_xIndustrial applications
650 0 _aIntegrated circuits
_xMasks
650 0 _aMetal oxide semiconductors, complementary
_xDesign and construction
650 0 _aManufacturing processes
700 1 _aSuzuki, Kazuaki
700 1 _aSmith, Bruce W.,
_d1959-
856 4 0 _uhttps://eresourcesptsl.ukm.remotexs.co/login?url=http://www.egnetbase.com/ejournals/search/advsearch1.asp
856 4 0 _3CRCnetBASE
_uhttp://www.engnetbase.com/ejournals/books/book_km.asp?id=5515
_zClick here for the electronic version
907 _a.b14529890
_b2022-04-06
_c2019-11-12
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