| 000 | 01781cam a22004098a 4500 | ||
|---|---|---|---|
| 005 | 20250918011707.0 | ||
| 006 | m d | ||
| 007 | cr cn ---ancau | ||
| 008 | 090701s2007 flu sb 001 0 eng | ||
| 010 | _a2006-102599 | ||
| 020 | _a9781574446753 | ||
| 020 | _a1574446754 | ||
| 035 | _a14675657 | ||
| 039 | 9 |
_y07-01-2009 _zpuitm2 |
|
| 040 | _aUKM | ||
| 082 | 0 | 0 |
_a621.3815/2 _222 |
| 090 |
_aTK7871.85 _b.H3335 2007 |
||
| 245 | 0 | 0 |
_aHandbook of semiconductor manufacturing technology _h[electronic resource] / _cSecond Edition edited by Robert Doering and Yoshio Nishi |
| 260 |
_aBoca Raton : _bCRC/Taylor & Francis, _c2007 |
||
| 500 | _aAccess to 2http://www.egnetbase.com/ejournals/search/advsearch1.asp3 and type in the title. You may access the full text after you type in the advanced search screen | ||
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 |
_aSemiconductors _xDesign and construction _vHandbooks, manuals, etc. |
|
| 650 | 0 |
_aSemiconductor industry _vHandbooks, manuals, etc |
|
| 700 | 1 |
_aDoering, Robert, _d1946- |
|
| 700 | 1 |
_aNishi, Yoshio, _d1940- |
|
| 856 | 4 | 0 | _uhttps://eresourcesptsl.ukm.remotexs.co/login?url=http://www.egnetbase.com/ejournals/search/advsearch1.asp |
| 856 | 4 | 0 |
_3CRCnetBASE _uhttp://www.engnetbase.com/ejournals/books/book_km.asp?id=5611 _zClick here for the electronic version |
| 907 |
_a.b14529336 _b2022-04-06 _c2019-11-12 |
||
| 942 |
_n0 _kTK7871.85 .H3335 2007 |
||
| 914 | _avtls003412712 | ||
| 906 |
_a7 _brix _corignew _d1 _eecip _f20 _gy-gencatlg |
||
| 990 | _aaini | ||
| 998 |
_ae _b2009-01-07 _cm _dz _feng _gflu _y0 _z.b14529336 |
||
| 999 |
_c445160 _d445160 |
||