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082 0 0 _a621.3815/2
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090 _aTK7871.85
_b.H3335 2007
245 0 0 _aHandbook of semiconductor manufacturing technology
_h[electronic resource] /
_cSecond Edition edited by Robert Doering and Yoshio Nishi
260 _aBoca Raton :
_bCRC/Taylor & Francis,
_c2007
500 _aAccess to 2http://www.egnetbase.com/ejournals/search/advsearch1.asp3 and type in the title. You may access the full text after you type in the advanced search screen
504 _aIncludes bibliographical references and index
650 0 _aSemiconductors
_xDesign and construction
_vHandbooks, manuals, etc.
650 0 _aSemiconductor industry
_vHandbooks, manuals, etc
700 1 _aDoering, Robert,
_d1946-
700 1 _aNishi, Yoshio,
_d1940-
856 4 0 _uhttps://eresourcesptsl.ukm.remotexs.co/login?url=http://www.egnetbase.com/ejournals/search/advsearch1.asp
856 4 0 _3CRCnetBASE
_uhttp://www.engnetbase.com/ejournals/books/book_km.asp?id=5611
_zClick here for the electronic version
907 _a.b14529336
_b2022-04-06
_c2019-11-12
942 _n0
_kTK7871.85 .H3335 2007
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