000			02005cam a22004574a 4500
005			20250918011706.0
006			m d
007			cr cn ---ancau
008			090701s2002 flua sb 001 0 eng
010			_a2001-043935
020			_a0849311543
035			_a12543096
039		9	_y07-01-2009 _zpuitm2
040			_aUKM
042			_apcc
082	0	0	_a621.36 _221
090			_aTJ1191.5 _b.M5526 2002
100	1		_aMinh, Phan Ngoc.
245	1	0	_aFabrication of silicon microprobes for optical near-field applications _h[electronic resource] / _cPhan Ngoc Minh, Ono Takahito, Esashi Masayoshi.
260			_aBoca Raton, Fla. : _bCRC Press, _cc2002.
300			_a180 p. : _bill. ; _c25 cm.
500			_aAccess to 2http://www.egnetbase.com/ejournals/search/advsearch1.asp3 and type in the title. You may access the full text after you type in the advanced search screen
504			_aIncludes bibliographical references and index.
650		0	_aMicromachining.
650		0	_aSilicon.
650		0	_aNear-field microscopy.
650		0	_aMicroprobe analysis.
700	1		_aTakahito, Ono.
700	1		_aEsashi, Masayoshi, _d1949-
856	4	0	_uhttps://eresourcesptsl.ukm.remotexs.co/login?url=http://www.egnetbase.com/ejournals/search/advsearch1.asp
856	4	0	_3CRCnetBASE _uhttp://www.engnetbase.com/ejournals/books/book_km.asp?id=5772 _zClick here for the electronic version
907			_a.b1452899x _b2022-04-06 _c2019-11-12
942			_n0 _kTJ1191.5 .M5526 2002
914			_avtls003412676
906			_a7 _bcbc _corignew _d1 _eocip _f20 _gy-gencatlg
990			_aaini
998			_ae _b2009-01-07 _cm _dz _feng _gflu _y0 _z.b1452899x
999			_c445126 _d445126