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_aOptical inspection of microsystems _h[electronic resource] / _cedited by Wolfgang Osten |
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_aBoca Raton, FL : _bCRC/Taylor & Francis, _cc2007 |
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_aOptical science and engineering ; _v109 |
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| 500 | _aAccess to 2http://www.engnetbase.com/ejournals/search/advsearch1.asp3 and type in the title. You may access the full text after you type in the advanced search screen | ||
| 504 | _aIncludes bibliographical references and index | ||
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_aQuality control _xOptical methods |
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_aOptical detectors _xIndustrial applications |
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_aMicroelectronics _960418 |
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| 700 | 1 | _aOsten, Wolfgang | |
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_aOptical science and engineering (Boca Raton, Fla.) ; _v109 |
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