| 000 | 01782nam a22004218a 4500 | ||
|---|---|---|---|
| 005 | 20250918005806.0 | ||
| 006 | m d | ||
| 007 | cr cn ---ancau | ||
| 008 | 090624s20099999flu sb 001 0 eng | ||
| 010 | _a2008-051282 | ||
| 020 | _a9781420059113 | ||
| 035 | _a15541280 | ||
| 039 | 9 |
_a200907080914 _bpuitm2 _c200907011523 _dzainah _y06-24-2009 _zpuitm2 |
|
| 040 | _aUKM | ||
| 082 | 0 | 0 |
_a621.3815/2 _222 |
| 090 |
_aTK7874.84 _b.P35 2009 |
||
| 100 | 1 | _aPaik, Ungyu | |
| 245 | 1 | 0 |
_aNanoparticle engineering for chemical-mechanical planarization _h[electronic resource] : _bfabrication of next-generation nanodevices / _cauthors, Ungyu Paik, Jea-Gun Park |
| 260 |
_aBoca Raton : _bTaylor & Francis, _c2009 |
||
| 500 | _aAccess to'http://www.engnetbase.com/ejournals/search/advsearch1.asp' and type the title. You may access the full text after you type in the advanced search screen | ||
| 500 | _a'A CRC title' | ||
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 | _aChemical mechanical planarization | |
| 650 | 0 | _aNanoparticles | |
| 650 | 0 | _aNanoelectronics | |
| 700 | 1 | _aPark, Jea-Gun | |
| 856 | 4 | 0 | _uhttps://eresourcesptsl.ukm.remotexs.co/login?url=http://www.engnetbase.com/ejournals/search/advsearch1.asp |
| 856 | 4 | 0 |
_3CRCnetBASE _uhttp://www.engnetbase.com/ejournals/books/book_km.asp?id=7464 _zClick here for the electronic version |
| 907 |
_a.b14521167 _b2022-04-06 _c2019-11-12 |
||
| 942 |
_n0 _kTK7874.84 .P35 2009 |
||
| 914 | _avtls003411854 | ||
| 906 |
_a7 _bcbc _corignew _d1 _eecip _f20 _gy-gencatlg |
||
| 990 | _aLiza | ||
| 998 |
_ae _b2009-11-06 _cm _dz _feng _gflu _y0 _z.b14521167 |
||
| 999 |
_c444366 _d444366 |
||