000 00719nam a2200217 a 4500
005 20250918005540.0
008 090519s2006 xxu 000 0 eng d
020 _a9781842651513
_cRM345.00
039 9 _a201001251103
_bbinar
_y05-19-2009
_zidah
100 1 _aKonuma, Mitsuharu
245 1 0 _aPlasma techniques for film deposition /
_cMitsuharu Konuma
260 _aNew York :
_bAlpha Science,
_c2006
500 _aPS Arena Ilmu - Dr. Noor Baayah
907 _a.b14485278
_b2019-11-13
_c2019-11-12
942 _n0
914 _avtls003407971
991 _aProgram Fizik - QFG
998 _anone
_b2009-06-05
_cm
_da
_feng
_gxxu
_y0
_z.b14485278
999 _c440981
_d440981