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| 005 | 20250913113806.0 | ||
| 008 | 981208s1995 xxua 00 0 eng | ||
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_a0890067074 _cRM281.41 |
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_a200711202104 _bjamil _c200111050900 _daliah _c200111050853 _daliah _y08-18-1999 _zload |
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| 090 | _aTK7871.85.C583 | ||
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_aComputational modeling in semiconductor processing / _cM. Meyyappan, editor |
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_aNorwood, MA. : _bArtech House, _c1995 |
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| 300 |
_ax, 363 p. : _bill. ; _c23 cm. |
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| 650 | 0 |
_aProcess control _xMathematical models |
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| 650 | 0 |
_aSemiconductors _xDesign and construction _xData processing |
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| 650 | 0 | _aSemiconductor industry | |
| 700 | 1 | _aMeyyappan, M. | |
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_a.b10418738 _b2020-10-12 _c2019-11-12 |
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_c01 _n0 _kTK7871.85.C583 |
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| 914 | _avtls000043592 | ||
| 990 | _ano | ||
| 991 | _aPusat Pengajian Fizik Gunaan | ||
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_al _b1999-05-08 _cm _da _feng _gxxu _y0 _z.b10418738 |
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