| 000 | 01389cam a2200337 a 4500 | ||
|---|---|---|---|
| 005 | 20250930125251.0 | ||
| 008 | 090310s2004 gw a 100 0 eng d | ||
| 020 | _a354021612X (hb) | ||
| 020 |
_a9783540216124 _cRM420.72 |
||
| 039 | 9 |
_a200905261554 _blan _c200905151642 _drahah _c200903101304 _didah _y03-10-2009 _zidah |
|
| 040 | _aUKM | ||
| 090 | _aTK7875 .F866 3 | ||
| 090 |
_aTK7875 _b.F866 |
||
| 245 | 0 | 0 |
_aFunctional micro- and nanosystems : _bproceedings of the 4th caesarium, Bonn, June 16-18, 2003 / _cKarl-Heinz Hoffmann, editor |
| 260 |
_aBerlin : _bSpringer, _c2004 |
||
| 300 |
_aviii, 131 p. : _bill. (some col.) ; _c24 cm. |
||
| 504 | _aIncludes bibliographical references | ||
| 650 | 0 |
_aMicroelectromechanical systems _vCongresses |
|
| 650 | 0 |
_aMicrostructure _vCongresses |
|
| 650 | 0 |
_aNanostructured materials _vCongresses _964113 |
|
| 700 | 1 |
_aHoffmann, K.-H. _q(Karl-Heinz) |
|
| 856 | 4 |
_3Publisher description _uhttp://www.loc.gov/catdir/enhancements/fy0818/2004103587-d.html |
|
| 856 | 4 |
_3Table of contents only _uhttp://www.loc.gov/catdir/enhancements/fy0818/2004103587-t.html |
|
| 907 |
_a.b14431920 _b2020-10-15 _c2019-11-12 |
||
| 942 |
_c01 _n0 _kTK7875 .F866 3 |
||
| 914 | _avtls003402418 | ||
| 990 | _arab | ||
| 991 | _aJabatan Kejuruteraan Elektrik, Elektronik & Sistem - KES | ||
| 998 |
_al _b2009-10-03 _cm _da _feng _ggw _y0 _z.b14431920 |
||
| 999 |
_c435750 _d435750 |
||