| 000 | 01535cam a2200361 a 4500 | ||
|---|---|---|---|
| 005 | 20250918004353.0 | ||
| 008 | 090306s2007 enka bi 001 0 eng | ||
| 020 |
_a9780470016992 _cRM475.80 |
||
| 020 | _a047001699X | ||
| 039 | 9 |
_a200904291313 _bariff _c200904241058 _drahah _c200903061117 _didah _y03-06-2009 _zidah |
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| 040 | _aUKM | ||
| 090 | _aTK7875.B347 3 | ||
| 090 | 0 |
_aTK7875 _b.B347 |
|
| 100 | 1 |
_aBaglio, S. _q(Salvatore) |
|
| 245 | 1 | 0 |
_aScaling issues and design of MEMS / _cSalvatore Baglio, Salvatore Castorina, Nicolo Savalli |
| 246 | 3 | _aScaling issues and design of microelectromechanical systems | |
| 260 |
_aChichester, West Sussex, England : _bJohn Wiley & Sons, _c2007 |
||
| 300 |
_axiii, 229 p. : _bill. ; _c24 cm. |
||
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 |
_aMicroelectromechanical systems _xDesign and construction |
|
| 700 | 1 | _aCastorina, Salvatore | |
| 700 | 1 | _aSavalli, Nicol | |
| 856 | 4 |
_3Publisher description _uhttp://www.loc.gov/catdir/enhancements/fy0743/2007037324-d.html |
|
| 856 | 4 |
_3Table of contents only _uhttp://www.loc.gov/catdir/enhancements/fy0810/2007037324-t.html |
|
| 856 | 4 |
_3Contributor biographical information _uhttp://www.loc.gov/catdir/enhancements/fy0834/2007037324-b.html |
|
| 907 |
_a.b14431038 _b2020-10-15 _c2019-11-12 |
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| 942 |
_c01 _n0 _kTK7875.B347 3 |
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| 914 | _avtls003402325 | ||
| 990 | _amaa | ||
| 991 | _aFakulti Kejuruteraan & Alam Bina (KEJ - P) | ||
| 998 |
_al _b2009-06-03 _cm _da _feng _genk _y0 _z.b14431038 |
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| 999 |
_c435662 _d435662 |
||