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005 20250918004353.0
008 090306s2007 enka bi 001 0 eng
020 _a9780470016992
_cRM475.80
020 _a047001699X
039 9 _a200904291313
_bariff
_c200904241058
_drahah
_c200903061117
_didah
_y03-06-2009
_zidah
040 _aUKM
090 _aTK7875.B347 3
090 0 _aTK7875
_b.B347
100 1 _aBaglio, S.
_q(Salvatore)
245 1 0 _aScaling issues and design of MEMS /
_cSalvatore Baglio, Salvatore Castorina, Nicolo Savalli
246 3 _aScaling issues and design of microelectromechanical systems
260 _aChichester, West Sussex, England :
_bJohn Wiley & Sons,
_c2007
300 _axiii, 229 p. :
_bill. ;
_c24 cm.
504 _aIncludes bibliographical references and index
650 0 _aMicroelectromechanical systems
_xDesign and construction
700 1 _aCastorina, Salvatore
700 1 _aSavalli, Nicol
856 4 _3Publisher description
_uhttp://www.loc.gov/catdir/enhancements/fy0743/2007037324-d.html
856 4 _3Table of contents only
_uhttp://www.loc.gov/catdir/enhancements/fy0810/2007037324-t.html
856 4 _3Contributor biographical information
_uhttp://www.loc.gov/catdir/enhancements/fy0834/2007037324-b.html
907 _a.b14431038
_b2020-10-15
_c2019-11-12
942 _c01
_n0
_kTK7875.B347 3
914 _avtls003402325
990 _amaa
991 _aFakulti Kejuruteraan & Alam Bina (KEJ - P)
998 _al
_b2009-06-03
_cm
_da
_feng
_genk
_y0
_z.b14431038
999 _c435662
_d435662