000			02008nam a22004575a 4500
005			20250930125208.0
006			m d
007			cr nn 008maaau
008			090205s2007 gw j eng d
020			_a9783211728611 (electronic bk.)
035			_a(Springer)978-3-211-72860-4
039		9	_y02-05-2009 _zmuhaimin
082	0	4	_a530.138 _221
090			_aTK7871.85 _b.I61 2007
111	2		_aInternational Conference on Simulation of Semiconductor Processes and Devices _d(2007 : _cVienna, Austria)
245	1	0	_aSimulation of semiconductor processes and devices 2007, SISPAD 2007 _h[electronic resource] / _cTibor Grasser, Siegfried Selberherr, eds.
260			_aWien ; _aNew York : _bSpringer, _cc2007.
300			_axv, 458 p. : _bdigital ; _c25 cm.
500			_aThe conference is the leading forum for Technology Computer-Aided Design and this volume includes 5 plenary lectures, 67 contributed talks, and 38 poster presentations.
500			_aAccompanying CD-ROM in back pocket.
504			_aIncludes bibliographical references and index.
650		0	_aSemiconductors _xMathematical models _vCongresses. _963615
650		0	_aComputer-aided design _vCongresses.
650	1	4	_aEngineering.
650	2	4	_aElectronics and Microelectronics, Instrumentation.
650	2	4	_aNanotechnology.
650	2	4	_aNumerical and Computational Methods in Engineering.
650	2	4	_aOptical and Electronic Materials.
650	2	4	_aSimulation and Modeling.
700	1		_aGrasser, Tibor.
700	1		_aSelberherr, Siegfried, _d1955-
710	2		_aSpringerLink (Online service)
773	0		_tSpringer e-books
856	4	0	_uhttps://eresourcesptsl.ukm.remotexs.co/user/login?url=http://dx.doi.org/10.1007/978-3-211-72861-1
907			_a.b14396567 _b2024-12-13 _c2019-11-12
942			_n0 _kTK7871.85 .I61 2007
914			_avtls003398652
998			_ae0001 _b2009-05-02 _cm _da _feng _ggw _y0 _z.b14396567
999			_c434389 _d434389