000			01618nam a22004215a 4500
005			20250918001930.0
006			m d
007			cr nn 008maaau
008			100623s2008 gw j eng d
020			_a9783540744337 (electronic bk.)
020			_a9783540744320 (paper)
035			_a(Springer)978-3-540-74432-0
039		9	_a201006231229 _bmuhaimin _c201006230931 _dmuhaimin _c200902041634 _dmuhaimin _y02-04-2009 _zmuhaimin
050	0	0	_aTJ940 _b.Y678 2008
082	0	0	_a621.55 _222
090			_aTJ940 _b.Y65 2008
100	1		_aYoshimura, Nagamitsu.
245	1	0	_aVacuum Technology _h[electronic resource] : _bPractice for Scientific Instruments / _cby Nagamitsu Yoshimura.
260			_aBerlin, Heidelberg : _bSpringer-Verlag Berlin Heidelberg, _c2008.
300			_a354 p. : _bill., digital ; _c24 cm.
650		0	_aVacuum technology.
650		0	_aScientific apparatus and instruments.
650	1	4	_aPhysics.
650	2	4	_aMachinery and Machine Elements.
650	2	4	_aMaterials Science.
650	2	4	_aMeasurement Science, Instrumentation.
650	2	4	_aNanotechnology.
650	2	4	_aSolid State Physics and Spectroscopy.
710	2		_aSpringerLink (Online service)
773	0		_tSpringer eBooks
856	4	0	_uhttps://eresourcesptsl.ukm.remotexs.co/user/login?url=http://dx.doi.org/10.1007/978-3-540-74433-7
907			_a.b1438470x _b2024-11-20 _c2019-11-12
942			_n0 _kTJ940 .Y65 2008
914			_avtls003397396
998			_ae0001 _b2009-04-02 _cm _da _feng _ggw _y0 _z.b1438470x
999			_c433218 _d433218