000			01600nam a22004095a 4500
005			20250918001919.0
006			m d
007			cr nn 008maaau
008			100623s2008 gw j eng d
020			_a9783540719298 (electronic bk.)
020			_a9783540719281 (paper)
035			_a(Springer)978-3-540-71928-1
039		9	_a201006230914 _bmuhaimin _c201006230908 _dmuhaimin _y02-03-2009 _zmuhaimin
082	0	0	_a621.3815 _222
090			_aTK7874 _b.V121 2008
245	0	0	_aVacuum Electronics _h[electronic resource] : _bComponents and Devices / _cedited by Joseph A. Eichmeier, Manfred K. Thumm.
260			_aBerlin, Heidelberg : _bSpringer-Verlag Berlin Heidelberg, _c2008.
300			_a536 p. : _bill., digital ; _c24 cm.
650		0	_aVacuum microelectronics.
650		0	_aVacuum technology.
650	1	4	_aEngineering.
650	2	4	_aElectronic and Computer Engineering.
650	2	4	_aElectronics and Microelectronics, Instrumentation.
650	2	4	_aOptical and Electronic Materials.
650	2	4	_aPhysics and Applied Physics in Engineering.
700	1		_aEichmeier, Joseph A.
700	1		_aThumm, Manfred K.
710	2		_aSpringerLink (Online service)
773	0		_tSpringer eBooks
856	4	0	_uhttps://eresourcesptsl.ukm.remotexs.co/user/login?url=http://dx.doi.org/10.1007/978-3-540-71929-8
907			_a.b1437979x _b2024-11-20 _c2019-11-12
942			_n0 _kTK7874 .V121 2008
914			_avtls003396879
998			_ae0001 _b2009-03-02 _cm _da _feng _ggw _y0 _z.b1437979x
999			_c432731 _d432731