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| 005 | 20250918000901.0 | ||
| 008 | 081202s2007 enka b 001 0 eng | ||
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_a9780470018934 (hbk.) _cRM692.00 |
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| 020 | _a9780470727300 (pbk.) | ||
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| 090 | _aTK7874.M25 3 | ||
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_aTK7874 _b.M25 |
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| 100 | 1 | _aMack, Chris A. | |
| 245 | 1 | 0 |
_aFundamental principles of optical lithography : _bthe science of microfabrication / _cChris Mack |
| 260 |
_aChichester, England : _bJohn Wiley & Sons, _c2007 |
||
| 300 |
_axvii, 515 p. : _bill. ; _c25 cm. |
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| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 |
_aIntegrated circuits _xDesign and construction |
|
| 650 | 0 |
_aMicrolithography _xIndustrial applications |
|
| 856 | 4 | 1 |
_3Table of contents only _uhttp://www.loc.gov/catdir/enhancements/fy0804/2007044548-t.html |
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_a.b14311641 _b2020-10-15 _c2019-11-12 |
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| 942 |
_c01 _n0 _kTK7874.M25 3 |
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| 914 | _avtls003389794 | ||
| 990 | _aza | ||
| 991 | _aInstitut Kejuruteraan Mikro dan Nanoelektronik - Pasca | ||
| 998 |
_al _b2008-02-12 _cm _da _feng _genk _y0 _z.b14311641 |
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| 999 |
_c426073 _d426073 |
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