| 000 | 01267nam a2200337 a 4500 | ||
|---|---|---|---|
| 005 | 20250918000729.0 | ||
| 008 | 081029s2008 gw a b 001 0 eng | ||
| 020 |
_a9783527314942 (hbk.) _cRM795.80 |
||
| 020 | _a3527314946 (hbk.) | ||
| 039 | 9 |
_a200811121457 _bbedah _c200810291002 _drasyilla _y10-29-2008 _zrasyilla |
|
| 040 | _aUKM | ||
| 090 | _aTK7875.R458 3 | ||
| 090 |
_aTK7875 _b.R458 |
||
| 245 | 0 | 0 |
_aReliability of MEMS / _cedited by Osamu Tabata and Toshiyuki Tsuchiya |
| 260 |
_aWeinheim : _bWiley-VCH, _c2008 |
||
| 300 |
_axx, 303 p. : _bill. ; _c25 cm. |
||
| 440 | 0 |
_aAdvanced micro & nanosystems ; _vv.6 |
|
| 500 | _a'Testing of materials and devices' -- Cover | ||
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 |
_aMicroelectromechanical systems _xReliability |
|
| 700 | 1 | _aTsuchiya, Toshiyuki | |
| 700 | 1 |
_aTabata, Osamu, _d1956- |
|
| 856 | 4 | 1 |
_3Table of contents only _uhttp://www.loc.gov/catdir/enhancements/fy0838/2008459617-t.html |
| 907 |
_a.b14290856 _b2021-05-28 _c2019-11-12 |
||
| 942 |
_c01 _n0 _kTK7875.R458 3 |
||
| 914 | _avtls003387616 | ||
| 990 | _aza | ||
| 991 | _aInstitut Kejuruteraan Mikro dan Nanoelektronik (IMEN) - Pasca | ||
| 998 |
_al _b2008-03-10 _cm _da _feng _ggw _y0 _z.b14290856 |
||
| 999 |
_c424098 _d424098 |
||