| 000 | 01203nam a2200325 a 4500 | ||
|---|---|---|---|
| 005 | 20250930124701.0 | ||
| 008 | 081023s2008 njua b 001 0 eng | ||
| 020 |
_a9780470083017 (hbk.) _cRM415.02 |
||
| 039 | 9 |
_a200811071557 _bbedah _c200810231012 _drasyilla _y10-23-2008 _zrasyilla |
|
| 040 | _aUKM | ||
| 090 | _aTK7874.H784 2008 3 | ||
| 090 |
_aTK7874 _b.H784 2008 |
||
| 100 | 1 | _aHsu, Tai-Ran | |
| 245 | 1 | 0 |
_aMems and microsystems : _bdesign, manufacture, and packaging / _cTai-Ran Hsu |
| 250 | _a2nd ed. | ||
| 260 |
_aHoboken, N. J. : _bJohn Wiley & Sons, _c2008 |
||
| 300 |
_axxv, 550 p. : _bill. ; _c24 cm. |
||
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 |
_aMicroelectronics _960418 |
|
| 650 | 0 | _aMicroelectromechanical systems | |
| 650 | 0 |
_aMicroelectronic packaging _960415 |
|
| 856 | 4 | 1 |
_3Table of contents only _uhttp://www.loc.gov/catdir/toc/ecip0716/2007017041.html |
| 907 |
_a.b14289374 _b2021-05-28 _c2019-11-12 |
||
| 942 |
_c01 _n0 _kTK7874.H784 2008 3 |
||
| 914 | _avtls003387461 | ||
| 990 | _aza | ||
| 991 | _aInstitut Kejuruteraan Mikro dan Nanoelektronik (IMEN) - Pasca | ||
| 998 |
_al _b2008-10-10 _cm _da _feng _gnju _y0 _z.b14289374 |
||
| 999 |
_c423953 _d423953 |
||