000 01493nam a2200325 a 4500
005 20250930124701.0
008 081023s2007 si a b 100 0 eng
020 _a9789812709608 (hbk.)
_cRM619.34
020 _a9812709606 (hbk.)
039 9 _a200811071536
_bbedah
_c200811071534
_dbedah
_c200810231003
_drasyilla
_y10-23-2008
_zrasyilla
090 _aTK7875.I538 2007 3
090 _aTK7875
_b.I538 2007
111 2 _aInternational Conference on Materials for Advanced Technologies
_d(2007 :
_cSingapore)
245 1 0 _aMEMS technology and devices :
_bSuntec, Singapore, 1-6 July 2007 /
_cAiqun Liu ... [et al.].
260 _aSingapore :
_bPan Stanford Pub.,
_c2007
300 _axv, 441 p. :
_bill. ;
_c24 cm. +
_e1 computer laser optical disc (4 3/4 in.)
500 _a'ICMAT 2007 conference proceedings'--T.p. verso
500 _aBook is accompanied by 1 computer laser optical disc, entitled'MEMS technology and devices CD ROM' bearing the same call number and available at Bahagian Koleksi Media
504 _aIncludes bibliographical references
650 0 _aMicroelectromechanical systems
_vCongresses
650 0 _aNanostructured materials
_vCongresses
_964113
700 1 _aLiu, Aiqun
907 _a.b14289350
_b2021-05-28
_c2019-11-12
942 _c01
_n0
_kTK7875.I538 2007 3
914 _avtls003387459
990 _aza
991 _aInstitut Kejuruteraan Mikro dan Nanoelektronik (IMEN) - Pasca
998 _al
_b2008-10-10
_cm
_da
_feng
_gsi
_y0
_z.b14289350
999 _c423951
_d423951