000 01354cam a22003494a 4500
005 20250930124549.0
008 080825s2007 fluaf bi 001 0 eng
020 _a0849336821 (alk. paper)
020 _a9780849336829
_cRM487.31
039 9 _a200812161147
_blan
_c200811191541
_drahah
_c200808251158
_didah
_y08-25-2008
_zidah
040 _aUKM
090 _aTS156.2.O684 pasca
090 _aTS156.2
_b.O684
245 0 0 _aOptical inspection of microsystems /
_cedited by Wolfgang Osten
260 _aBoca Raton, FL :
_bCRC/Taylor & Francis,
_c2007
300 _a503 p., [8] p. of plates :
_bill. (some col.) ;
_c26 cm.
490 1 _aOptical science and engineering ;
_v109
504 _aIncludes bibliographical references and index
650 0 _aQuality control
_xOptical methods
650 0 _aOptical detectors
_xIndustrial applications
650 0 _aMicroelectronics
_960418
700 1 _aOsten, Wolfgang
830 0 _aOptical science and engineering (Boca Raton, Fla.) ;
_v109
856 4 2 _3Publisher description
_uhttp://www.loc.gov/catdir/enhancements/fy0648/2005046670-d.html
907 _a.b14263853
_b2021-05-28
_c2019-11-12
942 _c01
_n0
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990 _arab
991 _aJbt. Kej. Mekanikal & Bahan
998 _al
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