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|---|---|---|---|
| 005 | 20250930124549.0 | ||
| 008 | 080825s2007 fluaf bi 001 0 eng | ||
| 020 | _a0849336821 (alk. paper) | ||
| 020 |
_a9780849336829 _cRM487.31 |
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| 039 | 9 |
_a200812161147 _blan _c200811191541 _drahah _c200808251158 _didah _y08-25-2008 _zidah |
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| 040 | _aUKM | ||
| 090 | _aTS156.2.O684 pasca | ||
| 090 |
_aTS156.2 _b.O684 |
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| 245 | 0 | 0 |
_aOptical inspection of microsystems / _cedited by Wolfgang Osten |
| 260 |
_aBoca Raton, FL : _bCRC/Taylor & Francis, _c2007 |
||
| 300 |
_a503 p., [8] p. of plates : _bill. (some col.) ; _c26 cm. |
||
| 490 | 1 |
_aOptical science and engineering ; _v109 |
|
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 |
_aQuality control _xOptical methods |
|
| 650 | 0 |
_aOptical detectors _xIndustrial applications |
|
| 650 | 0 |
_aMicroelectronics _960418 |
|
| 700 | 1 | _aOsten, Wolfgang | |
| 830 | 0 |
_aOptical science and engineering (Boca Raton, Fla.) ; _v109 |
|
| 856 | 4 | 2 |
_3Publisher description _uhttp://www.loc.gov/catdir/enhancements/fy0648/2005046670-d.html |
| 907 |
_a.b14263853 _b2021-05-28 _c2019-11-12 |
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| 942 |
_c01 _n0 _kTS156.2.O684 pasca |
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| 914 | _avtls003384754 | ||
| 990 | _arab | ||
| 991 | _aJbt. Kej. Mekanikal & Bahan | ||
| 998 |
_al _b2008-12-08 _cm _da _feng _gflu _y0 _z.b14263853 |
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| 999 |
_c421507 _d421507 |
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