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| 100 | 0 | _aAzrul Azlan Hamzah | |
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_aSputtered silicon encapsulation : _bwafer level packaging for MEMs devices / _cAzrul Azlan Bin Hamzah |
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_aBangi : _bInstitut Kejuruteraan Mikro dan Nanoelektronik, Universiti Kebangsaan Malaysia, _c2008 |
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| 502 | _aThesis (Ph.D) - Universiti Kebangsaan Malaysia, 2008 | ||
| 504 | _aReferences : p. [315] - 327 | ||
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_aUniversiti Kebangsaan Malaysia _xDissertations _962865 |
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_aDissertations, Academic _zMalaysia _962866 |
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| 991 | _aInstitut Kejuruteraan Mikro dan Nanoelektronik | ||
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