| 000 | 01230cam a2200337 a 4500 | ||
|---|---|---|---|
| 005 | 20250930124256.0 | ||
| 008 | 080530s2008 ne a bi 001 0 eng | ||
| 020 |
_a9780815515548 _cRM881.46 |
||
| 020 | _a0815515545 | ||
| 039 | 9 |
_a200811201008 _blan _c200811200927 _dlan _c200811141212 _drahah _y05-30-2008 _zfakrul |
|
| 040 | _aUKM | ||
| 090 | _aTK7871.85.H366 2008 3 | ||
| 090 |
_aTK7871.85 _b.H366 2008 |
||
| 245 | 0 | 0 |
_aHandbook of silicon wafer cleaning technology / _cedited by Karen A. Reinhardt, Werner Kern |
| 250 | _a2nd ed. | ||
| 260 |
_aNorwich, New York : _bWilliam Andrew, _c2008 |
||
| 300 |
_axxvi, 718 p. : _bill. ; _c24 cm. |
||
| 490 | 1 | _aMaterials science & process technology series | |
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 | _aSilicon-on-insulator technology | |
| 700 | 1 | _aReinhardt, Karen A. | |
| 700 | 1 |
_aKern, Werner, _d1925- _939128 |
|
| 830 | 0 | _aMaterials science and process technology series | |
| 907 |
_a.b14203595 _b2021-05-28 _c2019-11-12 |
||
| 942 |
_c01 _n0 _kTK7871.85.H366 2008 3 |
||
| 914 | _avtls003378264 | ||
| 990 | _arab | ||
| 991 | _aInstitut Kej. Mikro & Nanoelektronik | ||
| 998 |
_at _b2008-04-05 _cm _da _feng _gne _y0 _z.b14203595 |
||
| 999 |
_c415764 _d415764 |
||